Rapid measurement of low-order aberrations using Fourier transforms of crystalline Ronchigrams.

The aberrations of the objective lens should be measured and adjusted to realize high spatial resolution in scanning transmission electron microscopy (STEM). Here we report a method of measuring low-order aberrations using the Fourier transforms of Ronchigrams of an arbitrary crystal such as a specimen of interest. We have applied this technique to measure first- and second-order geometrical aberrations using typical standard specimens. Focus and twofold astigmatism are measured using two Ronchigrams obtained under different foci. Axial coma and threefold astigmatism are evaluated using the Fourier transforms of small subareas of a Ronchigram. The time dependences of focus and twofold astigmatism are examined using this technique for an aberration-corrected microscope.